28 Oktabr 2020
70Asosiy til:Rus
ДАТЧИКИ СКОРОСТИ ПОТОКА СПЛОШНЫХ СРЕД
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MAQOLA ANNOTATSIYASI
The design features of a thermoanemometric sensor based on silicon with nanoclusters of Nickel atoms, which has high sensitivity and stability of output parameters, are considered. Their electrophysical parameters are studied depending on the type of continuous media.
MUALLIFLAR
S.Nasriddinov
НИИ физики полупроводников и микроэлектроники при НУУЗ
D.Esbergenov
НИИ физики полупроводников и микроэлектроники при НУУЗ
Teglar
# чувствительность# sensitivity# sensor# диффузия# легирование# температура# flow# поток# temperature# diffusion# silicon# датчик# alloying# кремний# nickel# никел
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Яримўтказгичлар физикаси ва микроэлектроника