This work provides information on the formation of the main part of thermal
radiation receivers. In addition, the article defines and creates optimal modes for creating
targets for magnetron sputtering from higher manganese silicide (Mn4Si7) and cobalt
monosilicide (CoSi). As is known, the device is formed from a two - type film, where the Mn4Si7
film gives the p - type, and the CoSi film gives the n - type. Films were formed using these
targets by magnetron sputtering and their electrophysical properties were studied. The results
obtained showed that the resulting films have a structure suitable for instrumentation. The
paper also presents theoretical studies on the creation of photomasks to create a device
design. Using the method of magnetron sputtering, a structure was created that can be used
in thermal radiation receivers. The mechanism of structure formation has been developed.
This work provides information on the formation of the main part of thermal
radiation receivers. In addition, the article defines and creates optimal modes for creating
targets for magnetron sputtering from higher manganese silicide (Mn4Si7) and cobalt
monosilicide (CoSi). As is known, the device is formed from a two - type film, where the Mn4Si7
film gives the p - type, and the CoSi film gives the n - type. Films were formed using these
targets by magnetron sputtering and their electrophysical properties were studied. The results
obtained showed that the resulting films have a structure suitable for instrumentation. The
paper also presents theoretical studies on the creation of photomasks to create a device
design. Using the method of magnetron sputtering, a structure was created that can be used
in thermal radiation receivers. The mechanism of structure formation has been developed.
№ | Name of reference |
---|---|
1 | J. Fei., H. Wang., Y. Fang. Novel neural network fractional-order sliding-mode control with application to active power filter. “IEEE transactions on systems, man, and cybernetics: systems”, 2021. 99. |
2 | P. Vaqueiro., A.V. Powell. Recent developments in nanostructured materials for highperformance thermoelectrics. “Journal of materials chemistry”, 2010. 9577. |
3 | A. Shakouri. Recent developments in semiconductor thermoelectric physics and materials. “Annual review of materials research”, 2011. 399. |
4 | S. Kishino., T. Imai., T. Lida., Y. Nakaishi., M. Shinada., Y. Takanashi., N. Hamada. Electronic and optical properties of bulk crystals of semiconducting orthorhombic BaSi2 prepared by the vertical Bridgman method. “Alloys Compd”, 2007. 22. |
5 | K. Hashimoto., K. Kurosaki., Y. Imamura., H. Muta., S. Yamanaka. “Appl. Phys”, 2007. 102. |
6 | K. Hashimoto., K. Kurosaki., H. Muta., S. Yamanaka. Thermoelectric Properties of LaDoped BaSi2. “Materials Transactions”, 2008. 1737. |
7 | D.A. Pshenay-Severin., Y.V. Ivanov., A.A. Burkov., A.T. Burkov. “Phys. Condens. Matter”, 2018. 30 |
8 | T. Yoneyama., A. Okada., M. Suzuno., T. Shibutami., K. Matsumaru., N. Saito., N. Yoshizawa., K. Toko., T. Suemasu. Formation of polycrystalline BaSi2 films by radiofrequency magnetron sputtering for thin-film solar cell applications. “Thin solid films”, 2003. 116. |
9 | V.L. Dubov. Formation, structure, optical and photoelectric properties of textured BaSi2 films on Si (111) and heterostructures based on them, “Dissertation. Blagoveshchensk”, 2019. 67 |
10 | V.V. Klechkovskaya., A.S. Rysbaev., T.S. Kamilov., I.R. Bekpulatov., B.D. Igamov., I.Kh. Turapov. “Uzbek Journal of Physics”, 2021. 43. |
11 | A.B. Tahir., I.A. Aqsa., T.M. Bilal., T.M. Ijaz. Interfaces and surfaces, chemistry of nanomaterials. “Fundamentals and Applications”, 2020. 51. |
12 | A. Mavrokefalos., M.T. Pettes., F. Zhou., L. Shi. Four-probe measurements of the inplane thermoelectric properties of nanofilms. "The review of scientific instruments”, 2007. 6 |
13 | B.B. Pitarch., J.P. Gonjal., A. Powell., P. Ziolkowski., J.G. Canadas. Thermal conductivity, electrical resistivity, and dimensionless figure of merit (ZT) determination of thermoelectric materials by impedance spectroscopy up to 250°C, “Journal of Applied Physics”, 2018. 124 |
14 | K.R. Stevens., M.G. Kanatzidis., S. Johnsen., S.N. Girard. Investigation of the Thermoelectric Properties of Metal Chalcogenides with SnSe. “Nanoscape”, 2010. 52 |
15 | Y. Yin., A. Tiwari. Understanding the effect of thickness on the thermoelectric properties of Ca3Co4O9 thin films. “Scientific Reports”, 2021. 6324 |
16 | F.Yu. Solomkin., A.S. Orekhov., S.V. Novikov., N.A. Arkharova., G.N. Isachenko., N.V. Zaitseva., N.V. Sharenkova., A.Yu. Samunin., V.V. Klechkovskaya., A.T. Burkov. Structure and thermoelectric properties of CoSi obtained from a supersaturated solution-melt in Sn. “Physics and technology of semiconductors”, 2019. 32. |
17 | B.D. Igamov., A.I. Kamardin., T.S. Kamilov., I.R. Bekpulatov., I.Kh. Turapov., D.D. Igamova. Evaluation of the thickness of vacuum metal and semiconductor coatings using computer programs. “Technical science and innovation”, 2021. 255 |
18 | A.S. Rysbaev., J.B. Khujaniyozov., I.R. Bekpulatov., A.M. Rakhimov., O.R. Pardaev. “Journal of surface investigation: x-ray, synchrotron and neutron techniques”, 2017. 474. |
19 | A.S. Rysbaev., J.B. Khujaniyazov., I.R. Bekpulatov., A.M. Rakhimov. “Journal of surface investigation: x-ray, synchrotron and neutron techniques”, 2017. 994 |
20 | T.S. Kamilov., A.S. Rysbaev., V.V. Klechkovskaya., A.S. Orekhov., B.D. Igamov., I.R. Bekpulatov. “Solar engineering materials science”, 2019. 380 |
21 | M.T. Normurodov., A.S. Rysbaev., I.R. Bekpulatov., D.A. Normurodov., Z.A. Tursunmetova. Formation and electronic structure of barium-monosilicide- and bariumdisilicide films. “Journal of surface investigation”, 2021. 211. |
22 | S.B. Donaev., A.K. Tashatov., B.E. Umirzakov. Effect of Ar+-ion bombardment on the composition and structure of the surface of CoSi2/Si (111) nanofilms. “Journal of surface investigation”, 2015. 406 |
23 | Z.A. Isakhanov., B.E. Umirzakov., M.K. Ruzibaeva., S.B. Donaev. Effect of the O2+-ion bombardment on the TiN composition and structure. “Technical Physics”, 2015. 313. |
24 | B.E. Umirzakov., S.B. Donaev. On the creation of ordered nuclei by ion bombardment for obtaining nanoscale si structures on the surface of CaF2 films. “Journal of surface investigation”, 2017. 746. |
25 | S.B. Donaev., B.E. Umirzakov., D.A. Tashmukhamedova. Electronic structure of Ga1–xAl xAs nanostructures grown on the GaAs surface by ion implantation. “Technical Physics”, 2015. 1563 |
26 | G. Imanova., I. Bekpulatov. Investigation on the Electronic Structure of Nanosized Barium Monosilicide Films Produced by Low-energy Implantation of Ba+ Ions in Si, “American journal of nano research and applications”, 2021. 32 |
27 | T. Agayev., G. Imanova., A. Aliyev, Influence of gamma radiation on current density and volt–ampere characteristics of metallic zirconium. “International Journal of Modern Physics B”, 2022. 36 |
28 | G.T. Imanova., T.N. Agayev., S.H. Jabarov. Investigation of structural and optical properties of zirconia dioxide nanoparticles by radiation and thermal methods. “Modern Physics Letters B”, 2021. 2150050. |
29 | Z.A. Tursunmetova., G. Imanova., I. Bekpulatov. Method for low-temperature vacuumthermal cleaning of surface single crystals Si and gas. “Dergipark publishing, journal of polytechnic”, 2022. 921 |