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Thin metal-oxide layers of ZnO on the silicon substrate obtained by spray pyrolysis and optimal technological modes determined. It was determined that, obtained ZnO films based on silicon have a hexagonal syngony, a wurzite structure with lattice parameters, а = 0.3265 nm and c = 0.5212 nm, with block sizes of 67 nm.

  • Name of journal
  • Number of edition
  • View count 425
  • Web Address
  • DOIdoi.org/10.47100/conference_physics/S2_5
  • Date of creation in the UzSCI system 14-08-2020
  • Read count 314
  • Date of publication
  • Main LanguageO'zbek
  • Pages37-43
Русский

Получены тонкие металлооксидные слои ZnO на подложке кремния, методом спрей-пиролиза и определены оптимальные технологические режимы. Обнаружены, что полученные пленки ZnO на основе кремния имеют гексагональную сингонию, типа вюрцитная структура с параметрами решетки, а = 0.3265 нм и c = 0.5212 нм, с размерами блоков 67 нм.

Ўзбек

Thin metal-oxide layers of ZnO on the silicon substrate obtained by spray pyrolysis and optimal technological modes determined. It was determined that, obtained ZnO films based on silicon have a hexagonal syngony, a wurzite structure with lattice parameters, а = 0.3265 nm and c = 0.5212 nm, with block sizes of 67 nm.

№ Author name position Name of organisation
1 Boboev A.Y.
2 Rembeza S..
3 Men'shikova T..
4 Svistova T..
№ Name of reference
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