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Kremniyda II- va III-davr elementlarining diffuziyasi ko’rib chiqiladi. Xususan, turli mualliflar tomonidan bu elementlar uchun olingan tajriba natijalari “Eng kichik kvadratlar usuili” bilan qayta ishlanib, har bir davrdagi barcha elemnetlarning diffuzin parametrlari uchun umumiy ifodalar olinadi hamda tajriba qiymatlari noma’lum bo’lgan elementlarning diffuzion parametrlari bashorat qilinadi.

  • Name of journal
  • Number of edition
  • View count 284
  • Web Address
  • DOIdoi.org/10.47100/conference_physics/S2_32
  • Date of creation in the UzSCI system 21-08-2020
  • Read count 171
  • Date of publication
  • Main LanguageO'zbek
  • Pages195-199
Ўзбек

Kremniyda II- va III-davr elementlarining diffuziyasi ko’rib chiqiladi. Xususan, turli mualliflar tomonidan bu elementlar uchun olingan tajriba natijalari “Eng kichik kvadratlar usuili” bilan qayta ishlanib, har bir davrdagi barcha elemnetlarning diffuzin parametrlari uchun umumiy ifodalar olinadi hamda tajriba qiymatlari noma’lum bo’lgan elementlarning diffuzion parametrlari bashorat qilinadi.

English

The diffusion of II - and III - period elements in silicon is considered. In particular, experimental data for the diffusion parameters of these elements obtained by various authors are processed using the least squares method and General expressions are obtained for the diffusion parameters of these elements, as well as the diffusion parameters of elements whose experimental values are unknown are predicted.

Author name position Name of organisation
1 Karimov I.N.
2 Nosirov M.Z.
3 Yuldasheva N..
4 Alieva J..
Name of reference
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2 B.I.Boltaks Diffuzija i tochechnye defekty v poluprovodnikakh, L. Nauka, 1972.
3 Okislenie, diffuzija, ehpitaksija, pod red. R.Burgera i R.Donovana, M. Mir, 1069, 451 s.
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6 M.Nosirov, Zh.Alieva Poluehmpiricheskie diffuzionnye parametry atomov 3d perekhodnykh ehlementov v kremnii//Matematicheskie i komp'juternoe modelirovanie № 2 (3), fevral', 2019 g., c.98-102
7 Zh.Alieva, M.Nasirov, M.Abdukakhkharova, N.Abbosova O diffuzionnykh parametrakh primesnykh atomov V gruppy ehlementov v kremnii// Molodojj uchenyjj, 2018, №51 (237),s.1-3.
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