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Thin metal-oxide layers of ZnO on the silicon substrate obtained by spray pyrolysis and optimal technological modes determined. It was determined that, obtained ZnO films based on silicon have a hexagonal syngony, a wurzite structure with lattice parameters, а = 0.3265 nm and c = 0.5212 nm, with block sizes of 67 nm.

  • Jurnal nomi
  • Nashr soni
  • Ko'rishlar soni 428
  • Internet havola
  • DOIdoi.org/10.47100/conference_physics/S2_5
  • UzSCI tizimida yaratilgan sana 14-08-2020
  • O'qishlar soni 317
  • Nashr sanasi
  • Asosiy tilO'zbek
  • Sahifalar37-43
Русский

Получены тонкие металлооксидные слои ZnO на подложке кремния, методом спрей-пиролиза и определены оптимальные технологические режимы. Обнаружены, что полученные пленки ZnO на основе кремния имеют гексагональную сингонию, типа вюрцитная структура с параметрами решетки, а = 0.3265 нм и c = 0.5212 нм, с размерами блоков 67 нм.

Ўзбек

Thin metal-oxide layers of ZnO on the silicon substrate obtained by spray pyrolysis and optimal technological modes determined. It was determined that, obtained ZnO films based on silicon have a hexagonal syngony, a wurzite structure with lattice parameters, а = 0.3265 nm and c = 0.5212 nm, with block sizes of 67 nm.

№ Muallifning F.I.Sh. Lavozimi Tashkilot nomi
1 Boboev A.Y.
2 Rembeza S..
3 Men'shikova T..
4 Svistova T..
№ Havola nomi
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